Technical Specification
| Pumping speed (60Hz) | m3/h (CFM) | 20 (12) | |
| Ultimate Pressure without Gas Ballast | mbar (Torr) | 1×10-4, (7.5×10-5) | |
| Ultimate Pressure Gas Ballast On | mbar (Torr) | 1×10-3, (7.5×10-4) | |
| Ultimate Pressure Nitrogen Purge On | mbar (Torr) | 1×10-3, (7.5×10-4) | |
| Gas Purge Dry Nitrogen/Dry Compressed Air | slm | / | |
| Gas Purge Pressure | Mpa | / | |
| Gas Purge Joint | / | ||
| Power Rating | kW | 1.8 | |
| Current at Ultimate Pressure | A | 7 | |
| Peak Current | A | 13 | |
| PID Functions | Yes | ||
| Analog Input | Yes | ||
| Communication Function | MODBUS-RTU | ||
| Inlet/Outlet | KF25 | ||
| Water Vapor Treatment Capacity | g/h | 500 | |
| Cooling Mode | Air Cooling | ||
| Noise | dB | ≤60 | |
| Weight | kg | 48 | |
| lbs | 105.8 | ||
| Dimensions (L*W*H) | mm | 599.4*299.7*320 | |
| inch | 23.6*11.8*12.6 | ||
